Real-time evaluation of thin film drying kinetics using an advanced, multi-probe optical setup
نویسندگان
چکیده
منابع مشابه
Real-time optical characterization of thin film growth
The further spatial reduction together with stringent thickness and composition tolerances in manufacturing of advanced electronic and optical devices require new approaches to control the growth process as well as to improve the insight into the deposition process itself. The development of non-invasive, real-time, structure-specific analytical tools for characterizing phenomena occurring at s...
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ژورنال
عنوان ژورنال: Journal of Materials Chemistry C
سال: 2016
ISSN: 2050-7526,2050-7534
DOI: 10.1039/c5tc03448e